Joint EuroCVD 21 – Baltic ALD 15 Conference
For the first time, the European Conferences Euro CVD and BalticALD will be organized together.
The topics include:
Precursors (design, synthesis and delivery)
Modelling (surface, gas phase, thermo chemistry, quantum chemistry, multi scale)
Process Equipment (reactors)
Energy Enhanced processes (Plasma, Hot wire, Photon)...